Publikationen
Kovacs, Andras
2023 | |||
| Przemyslaw Lopato, Michal Herbko, Ulrich Mescheder, Andras Kovacs | Influence of a thin dielectric layer on resonance frequencies of square SRR metasurface operating in THz band | Open Engineering, 13.2023(1), 2023 | BibTeX | RIS | DOI | URN |
| Przemyslaw Lopato, Michal Herbko, Paulina Gora, Ulrich Mescheder, Andras Kovacs, Alexander Filbert | Numerical Analysis of the Influence of Fabrication Process Uncertainty on Terahertz Metasurface Quality | Electronics, 12.2023(10), 2023 | BibTeX | RIS | DOI | URN |
| Shervin Keshavarzi, Andras Kovacs, Ulrich Mescheder | Surface Passivated Porous Silicon-Based Antireflective Coating | MikroSystemTechnik Kongress 2023, 23. - 25. Oktober 2023, Dresden, Germany, 2023 | BibTeX | RIS |
2022 | |||
| Andras Kovacs, Julien Petit, Alexander Filbert, Ulrich Mescheder | Mikro- und Nanotechnologien machen Optik smart | 2022 | BibTeX | RIS |
| Shervin Keshavarzi, Andras Kovacs, Ulrich Mescheder | Porous Silicon Based Ultra-Band infrared Antireflective and Light absorbing Coating | Porous Semiconductors - Science and Technology 2022, PSST2022, March 27th - April 1st, 2022, Lido di Camaire (Lucca), Italy, 2022 | BibTeX | RIS | DOI |
2021 | |||
| Hakan Alaboz, Andras Kovacs, Yasser Safa, Ulrich Mescheder | Development of Cost-Effective Automated Test System for Determining Lifetime of Gold Contacts Under Mechanical Load | MikroSystemTechnik Kongress 2021, 08. - 10. November 2021, Stuttgart-Ludwigsburg, Germany, pp. 738-741, 2021 | BibTeX | RIS |
| Isman M. Khazi, Andras Kovacs, Ulrich Mescheder | Effect of Surface Roughness on the Adhesion of PECVD coated Silicon-Carbide Thin-films on (110) monocrystalline-Silicon wafer | MikroSystemTechnik Kongress 2021, 08. - 10. November 2021, Stuttgart-Ludwigsburg, Germany, pp. 415-418, 2021 | BibTeX | RIS |
| Isman M. Khazi, Andras Kovacs, Ulrich Mescheder, Ali Zahedi, Bahman Azarhoushang | Fusion of Optical and Microfabricated Eddy-Current Sensors for the Non-Destructive Detection of Grinding Burn | Advances in Science, Technology and Engineering Systems Journal, 6.2021(1), pp. 1414-1421, 2021 | BibTeX | RIS | DOI | URN |
| Isman M. Khazi, Andras Kovacs, Ulrich Mescheder | Inductive Transducers with 2D Microcoils in Reflection Differential Transmitter-Receiver Mode for the Micro Non-Destructive Testing of Grinding Burn | The 21st International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2021, 20 - 25 June 2021, online virtual conference, pp. 1202-1205, 2021 | BibTeX | RIS | DOI |
2020 | |||
| Isman M. Khazi, Andras Kovacs, Ulrich Mescheder, Benjamin Sittkus, Rui Zhu | Kleiner, flexibler, leistungsfähiger | 2020 | BibTeX | RIS |
2019 | |||
| Isman M. Khazi, Andras Kovacs, Vaibhav Kumar, Pranav Dhumal, Ulrich Mescheder | Microfabricated 2D planar eddy-current microcoils for the non-destructive testing of grinding burn marks | Non-destructive Testing and Diagnostics, pp. 29-35, 2019 | BibTeX | RIS | DOI |
| Shervin Keshavarzi, Andras Kovacs, Mohammad Abdo, Vlad Badilita, Jan G. Korvink, Ulrich Mescheder | Miniaturized porous silicon rugate filter wheel for multispectral imaging applications | MikroSystemTechnik Kongress 2019 : Mikroelektronik | MEMS-MOEMS | Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin, pp. 464-467, 2019 | BibTeX | RIS |
| Shervin Keshavarzi, Andras Kovacs, Mohammad Abdo, Vlad Badilita, Rui Zhu, Jan G. Korvink, Ulrich Mescheder | Porous Silicon Based Rugate Filter Wheel for Multispectral Imaging Applications | ECS Journal of Solid State Science and Technology, 8.2019(3), pp. Q43-Q49, 2019 | BibTeX | RIS | DOI | URN |
| Shervin Keshavarzi, Andras Kovacs, Ulrich Mescheder | Porous silicon based antireflection coating for the MWIR range | MikroSystemTechnik Kongress 2019 : Mikroelektronik | MEMS-MOEMS | Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin, pp. 487-490, 2019 | BibTeX | RIS |
2017 | |||
| Dirk Benyoucef, Vera Kallfaß, Andras Kovacs, Ulrich Mescheder, Stefan Palzer | Mikrosystemtechnische Geruchssensorik und ihre Anwendungen in AAL | Assistive Systeme und Technologien zur Förderung der Teilhabe für Menschen mit Hilfebedarf : Ergebnisse aus dem Projektverbund ZAFH-AAL, Pabst Science Publisher: Lengerich, pp. 51-66, 2017 | BibTeX | RIS |
| Andras Kovacs, Alexey Ivanov, Ulrich Mescheder | Schmalbandige photonische Kristalle für Multispektral-Analyse | MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme, 23. – 25. Oktober 2017 in München, pp. 836-839, 2017 | BibTeX | RIS |
2016 | |||
| Alexey Ivanov, Andras Kovacs, Ulrich Mescheder | Application of local backside contacts for structuring Of silicon with anodization: simulation and experiments | Procedia Engineering, Vol.168.2016, pp. 1180-1183, 2016 | BibTeX | RIS | DOI |
| Andras Kovacs, Ulrich Mescheder | PSi-based Diffusion Membranes | Porous Silicon: Biomedical and Sensor Applications, Volume Two, Ghenadii Korotcenkov (Ed.)CRC Press: Boca Raton, pp. 279-298, 2016 | BibTeX | RIS |
2015 | |||
| Ulrich Mescheder, Andras Kovacs, Wolfgang Kronast, Bernhard Müller, Alexey Ivanov | Adaptiver optischer Filter bzw. spektral einstellbare Lichtquelle | 2015 | BibTeX | RIS |
| Volker Lange, Andras Kovacs, Robert Hönl | Laserspektroskopie von Gasen mit Kapillar-Lichtwellenleitern | 2015 | BibTeX | RIS |
| Alexey Ivanov, Isman M. Khazi, Andras Kovacs, Ulrich Mescheder | Miniaturisiertes Spektrometer für neue Ansätze in der Analytik | 2015 | BibTeX | RIS |
| Andras Kovacs, Alexey Ivanov, Ulrich Mescheder | Refractometer Using Photonic Crystals for Fermentation Process Characterization | IEEE SENSORS, Busan, 2015, pp. 1363-1366, 2015 | BibTeX | RIS | DOI |
| Andras Kovacs, Philipp Maurer, Ulrich Mescheder | Temperatureinfluss auf die Peakposition bei verschiedenen Umgebungsmedien in Porösen Silizium Multilayerschichten | MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe, pp. 547-550, 2015 | BibTeX | RIS |
| Andras Kovacs, Alexey Ivanov, Ulrich Mescheder | Tunable Narrow Band Porous Photonic Crystals for MOEMS Based Scanning Systems | Procedia Engineering, pp. 811-815, 2015 | BibTeX | RIS | DOI |
2014 | |||
| Ulrich Mescheder, Isman M. Khazi, Andras Kovacs, Alexey Ivanov | MOEMS based concept for miniaturized monochromators, spectrometers and tunable light sources | 1. Baden-Württemberg Center of Applied Research Symposium on Information and Communication Systems: SInCom 2014; 12. December 2014 in Furtwangen, pp. 38-43, 2014 | BibTeX | RIS |
| Ulrich Mescheder, Isman M. Khazi, Andras Kovacs, Alexey Ivanov | Tunable optical filters with wide wavelength range based on porous multilayers | Nanoscale Research Letters, p. 427, 2014 | BibTeX | RIS | DOI | URN |
2013 | |||
| Andras Kovacs, Aina Malisauskaite, Ulrich Mescheder | Einfluss der Morphologie auf die Sensitivität eines photonischen Biosensors | Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen, pp. 818-821, 2013 | BibTeX | RIS |
| Andras Kovacs, Aina Malisauskaite, Alexey Ivanov, Ulrich Mescheder, Rainer Wittig | Optical sensing and analysis system based on porous layers | 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS), 27-31 October 2013, Freiburg, Germany, pp. 275-277, 2013 | BibTeX | RIS |
| Andras Kovacs, Aina Malisauskaite, Alexey Ivanov, Ulrich Mescheder | Portable Optical Sensor Using Tunable Optical Multilayers | Sensors 2013, November 4-6, 2013, Baltimore, Maryland, USA: IEEE; Proceedings, pp. 1691-1694, 2013 | BibTeX | RIS | DOI |
| Andras Kovacs, Aina Malisauskaite, Alexey Ivanov, Ulrich Mescheder | Steuerung der Peaklage und der Sensitivität von siliziumbasierten porösen optischen Multischichten | Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen, pp. 185-188, 2013 | BibTeX | RIS |
| Andras Kovacs, Wolfgang Kronast, Alexander Filbert, Ulrich Mescheder | Transport in Surface Passivated Porous Silicon Membranes | ECS Transactions, 50.2013(37), pp. 207-216, 2013 | BibTeX | RIS |
2012 | |||
| Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke, Andras Kovacs | Contact Mechanics and Needle Like Surfaces for Micro-Nano Integration | 23rd Micromechanics and Microsystems Europe Workshop: MME 2012, September 9 - 12, Ilmenau, Germany, 2012 | BibTeX | RIS |
| Andras Kovacs, Alexey Ivanov, Aina Malisauskaite, Ulrich Mescheder | Oberflächenstabilisierung nanostrukturierter poröser Siliziumschichten für sensorische Anwendungen | 74. Mikro-Nano-Integration : Beiträge des 4. GMM-Workshops, 12. - 13. November 2012 in Berlin, 2012 | BibTeX | RIS |
| Andras Kovacs, Ulrich Mescheder | Transport mechanisms in nanostructured porous silicon layers for sensor and filter applications | Sensors and Actuators B: Chemical, 175.2012(December), pp. 179-185, 2012 | BibTeX | RIS | DOI |
2011 | |||
| Andras Kovacs, Ulrich Mescheder | Herstellung und Charakterisierung perforierter und poröser Membranmodulen für Mikro- und Nanofiltration | MikroSystemTechnik - Kongress 2011: 10. - 12. Oktober 2011, Darmstadt, 2011 | BibTeX | RIS |
| Alexey Ivanov, Andras Kovacs, Ulrich Mescheder | High quality 3D shapes by silicon anodization | physica status solidi (a), 208.2011(6), pp. 1383-1388, 2011 | BibTeX | RIS | DOI |
| Prasad Jonnalagadda, Ulrich Mescheder, Andras Kovacs, Antwi Nimo | Nanoneedles based on porous silicon for chip bonding with self assembly capability | physica status solidi (c), 8.2011(6: Special Issue: 7th International Conference on Porous Semiconductors – Science and Technology (PSST 2010) • EnFI 2010 Conference – Engineering of Functional Interfaces), pp. 1841-1846, 2011 | BibTeX | RIS | DOI |
| Ulrich Mescheder, Prasad Jonnalagadda, Andras Kovacs, X. Meng | Optischer Biosensor mittels selbstorganisierter nanostrukturierte Multilayerschichten | 2011 | BibTeX | RIS |
| Andras Kovacs, Prasad Jonnalagadda, Ulrich Mescheder | Optoelectrical detection system using porous silicon-based optical multilayers | IEEE Sensors Journal, 11.2011(10), pp. 2413-2420, 2011 | BibTeX | RIS | DOI |
2010 | |||
| Alexey Ivanov, Andras Kovacs, Ulrich Mescheder | Nasschemisches Ätzen von nahezu beliebigen 3D-Strukturen in Silizium | 63. Mikro-Nano-Integration - 2. GMM-Workshops 03.03.2010 - 04.03.2010 in Erfurt, Germany, 2010 | BibTeX | RIS |
| Ulrich Mescheder, Prasad Jonnalagadda, Andras Kovacs, X. Meng | Optischer Biosensor mittels selbstorganisierter nanostrukturierte Multilayerschichten | 63. Mikro-Nano-Integration - 2. GMM-Workshops 03.03.2010 - 04.03.2010 in Erfurt, Germany, pp. 105-110, 2010 | BibTeX | RIS |
| Andras Kovacs, Ulrich Mescheder, Prasad Jonnalagadda, X. Meng | Optisches Messsystem für biosensorische Anwendungen | Sensoren und Messsysteme 2010 : Vorträge der 15. ITG-GMA-Fachtagung vom 18. bis 19. Mai 2010 in Nürnberg, 2010 | BibTeX | RIS |
2009 | |||
| Andras Kovacs, Prasad Jonnalagadda, X. Meng, Ulrich Mescheder | Characterization of porous silicon based optical sensor system for biosensor applications | IEEE Sensors 2009 Conference, New Zealand, 25-28 October, 2009, Christchurch, New Zealand, pp. 21-26, 2009 | BibTeX | RIS | DOI |
| Andras Kovacs, Prasad Jonnalagadda, X. Meng, Ulrich Mescheder | Entwicklung und Charakterisierung von photonischen Multischichten aus porösem Silizium für biosensorische Anwendungen | MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany, 2009 | BibTeX | RIS |
| Andras Kovacs, Dirk Meister, Ulrich Mescheder | Investigation of humidity adsorption in porous silicon layers | physica status solidi (a), 206.2009(6), pp. 1343-1347, 2009 | BibTeX | RIS | DOI |
| Ulrich Mescheder, Andras Kovacs, Jutaphorn Kritwattanakhorn, Bernhard Müller, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein, Christoph Ament, Andreas Peter | Mikrostrukturierter Sensorarray zur Luftqualitätsmessung (MOSEL) | Dokumentation zum Forschungstag 2009 "Hochtechnologieforschung": 7. Juli 2009, Kultur- und Kongresszentrum, Liederhalle Stuttgart, p. 169, 2009 | BibTeX | RIS |
| Ulrich Mescheder, Andras Kovacs, Prasad Jonnalagadda, Antwi Nimo | Nanostrukturierte Siliziumoberflächen für Mikro-Nano-Integration | MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany, 2009 | BibTeX | RIS |
| Alexey Ivanov, Andras Kovacs, Ulrich Mescheder, S. Kuhn, M. Kübler, A. Burr | Optimisation of Surface Quality of 3D Silicon Master Forms for Injection Molding of Optical Micro Elements | MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany, 2009 | BibTeX | RIS |
| Ulrich Mescheder, Andras Kovacs, Prasad Jonnalagadda, Antwi Nimo | Selbstjustierendes Bondverfahren unter Verwendung nanostrukturierter Oberflächen | 2009 | BibTeX | RIS |
| Ulrich Mescheder, Andras Kovacs, Prasad Jonnalagadda, Antwi Nimo, David Kauzlaric, Jan Lienemann, Andreas Greiner, Jan Korvink, Markus Freudenreich | Skalierbare Verbindungstechnik mittels anpassbarer nanoskaliger Verbindungsstrukturen (NanoBond) | 2009 | BibTeX | RIS |
2008 | |||
| Adam Kovacs, Andras Kovacs, Ulrich Mescheder | Estimation of elasticity modulus and fracture strength of thin perforated SiN membranes with finite element simulations | Computational Materials Science, 43.2008(1), pp. 59-64, 2008 | BibTeX | RIS | DOI |
2007 | |||
| Alexey Ivanov, Ulrich Mescheder, Andras Kovacs, Rolf Huster | Einfluss unterschiedlicher Passivierungsschichten auf die Bildungsrate von porösem Silizium an Strukturkanten bei der 3DFormherstellung | Mikrosystemtechnik-Kongress 2007 : 15. - 17. Oktober 2007, Dresden, 2007 | BibTeX | RIS |
| Ulrich Mescheder, Marie-Luise Bauersfeld, Andras Kovacs, Jutaphorn Kritwattanakhorn, Bernhard Müller, Andreas Peter, Christoph Ament, Sven Rademacher, Jürgen Wöllenstein | MEMS-Based Air Quality Sensor | Transducers '07 Eurosensors XXI : digest of technical papers ; the 14th International Conference on Solid-State Sensors, Actuators and Microsystems, June 10-14, 2007, Lyon, France, pp. 1417-1420, 2007 | BibTeX | RIS | DOI |
| Andras Kovacs, Adam Kovacs, M. Pogany, Ulrich Mescheder | Mechanical investigation of perforated and porous membranes for micro- and nanofilter applications | Sensors and Actuators B: Chemical, 127.2007(1), pp. 120-125, 2007 | BibTeX | RIS | DOI |
| Andras Kovacs, Adam Kovacs, Marton Pogany, Ulrich Mescheder | Mikrosystemtechnik: Herstellung perforierter und poröser Membranmodule für die Mikro- und Nanofiltration | 2007 | BibTeX | RIS |
| Jutaphorn Kritwattanakhorn, Andras Kovacs, Ulrich Mescheder, Bernd Müller, Christoph Ament, Andreas Peter, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein | Mikrosystemtechnik: Sensorarray zur Lufqualitätsmessung | 2007 | BibTeX | RIS |
| Andreas Peter, Christoph Ament, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein, Jutaphorn Kritwattanakhorn, Andras Kovacs, Bernhard Müller, Ulrich Mescheder | Modellbasierte Verfahren zur Bestimmung der Luftgüte | Mikrosystemtechnik-Kongress 2007 : 15. - 17. Oktober 2007, Dresden, 2007 | BibTeX | RIS |
| Jutaphorn Kritwattanakhorn, Marie-Luise Bauersfeld, Andras Kovacs, Bernhard Müller, Ulrich Mescheder, Sven Rademacher, Jürgen Wöllenstein | Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems | Sensors and Actuators B: Chemical, 127.2007(1), pp. 126-131, 2007 | BibTeX | RIS | DOI |
| Andras Kovacs, Bernhard Müller, Jutaphorn Kritwattanakhorn, Ulrich Mescheder, Andreas Peter, Christoph Ament, Jürgen Wöllenstein, Marie-Luise Bauersfeld, Sven Rademacher | Sensor system for air quality measurement | Smart system integration 2007 : Paris, France 27. - 28.03.2007, pp. 519-522, 2007 | BibTeX | RIS |
2006 | |||
| Rolf Huster, Andras Kovacs, Ulrich Mescheder | 3-D Micro Free-Form Manufacturing in Silicon: Micro Free- Form Production for Plastics Moulding Technology | Galvanotechnik, 97.2006(2), pp. 442-447, 2006 | BibTeX | RIS |
| Adam Kovacs, Zsolt Vizvary, Andras Kovacs, Ulrich Mescheder | Large Defection Analysis of Perforated Silicon Nitride Membranes | 6th European Solid Mechanics Conference: ESMC 2006; 28 August – 1 September, 2006 Budapest, Hungary, 2006 | BibTeX | RIS |
| Jutaphorn Kritwattanakhorn, Andras Kovacs, Ulrich Mescheder, Bernhard Müller, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein | Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems | XX Eurosensors: 20th Anniversary; Göteborg, Sweden, 17-20 September 2006, pp. 376-377, 2006 | BibTeX | RIS |
| Andras Kovacs, M. Pogany, Ulrich Mescheder, Adam Kovacs | Realization and mechanical investigation of perforated and porous membranes for filter applications | XX Eurosensors: 20th Anniversary; Göteborg, Sweden, 17-20 September 2006, pp. 392-393, 2006 | BibTeX | RIS |
| Ulrich Mescheder, Andras Kovacs | Verfahren zur Bildung einer Ausnehmung in der Oberfläche eines Werkstücks, insbesondere zur Herstellung von Mikroformen | 2006 | BibTeX | RIS |
2005 | |||
| Christoph Ament, Marie-Luise Bauersfeld, Andras Kovacs, Jutaphorn Kritwattanakhorn, Ulrich Mescheder, Bernhard Müller | "Single chip"-Sensorarray zu Luftqualitätsmessung | Mikrosystemtechnik-Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg, 2005 | BibTeX | RIS |
| Rolf Huster, Andras Kovacs, Ulrich Mescheder | 3-D Micro Free-Form Manufacturing in Silicon Micro-Free- Form Production for Plastics Moulding Technology | Micro system technologies 2005 : International Conference & Exhibition on Micro-, Electro-Mechanical, Opto & Nano Systems, München, October 5 - 6, 2005, 2005 | BibTeX | RIS |
| Ulrich Mescheder, Andras Kovacs | 3D-Mikrostrukturierungsverfahren: von kristallinem Silizium mit lokal einstellbarem Anisotropiefaktor | MikroSystemTechnik, pp. 7-9, 2005 | BibTeX | RIS |
| Ulrich Mescheder, Andras Kovacs, Roland Schneider | Mikrosystemtechnik: Optische Penmaus mit Bluetooth | 2005 | BibTeX | RIS |
| Andreas Peter, Christoph Ament, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein, Andras Kovacs, Jutaphorn Kritwattanakhorn, Bernhard Müller, Ulrich Mescheder | Neuartiger Mikrosensor zur Luftgütemessung mit kombiniertem Feuchte- und Gassensor | 50. Internationales Wissenschaftliches Kolloquium, Technische Universität Ilmenau, 19.-23. September 2005, pp. 273-274, 2005 | BibTeX | RIS |
| Ulrich Mescheder, Andras Kovacs, Roland Schneider | Optische Penmaus mit Bluetooth | Horizonte, pp. 8-11, 2005 | BibTeX | RIS |
2003 | |||
| P. Fürjes, Andras Kovacs, Cs. Dücsö, Maria Adam, Bernhard Müller, Ulrich Mescheder | Porous silicon-based humidity sensor with interdigital electrodes and internal heaters | Sensors and Actuators B: Chemical, 95.2003(1-3), pp. 140-144, 2003 | BibTeX | RIS | DOI |
2002 | |||
| Ulrich Mescheder, Andras Kovacs, A. Fahad, Rolf Huster | 3D structuring of c-Si using porous silicon as sacrificial material | Proceedings of the 2002 2nd IEEE Conference on Nanotechnology: IEEE-NAN0 2002; August 26-28, Washington D.C., pp. 33-36, 2002 | BibTeX | RIS | DOI |
| Ulrich Mescheder, Andras Kovacs, Bernhard Müller | Sensorik: Porous Silicon Based Humidity Sensor with Interdigital Electrodes and Internal Heaters | 2002 | BibTeX | RIS |
| Ulrich Mescheder, Andras Kovacs, Bernhard Müller, Maria Adam, Istvan Barsony, Csaba Dücsö, Peter Fürjes | Verfahren zur Herstellung von Feuchtesensoren | 2002 | BibTeX | RIS |
2001 | |||
| Ulrich Mescheder, Andras Kovacs, Wolfgang Kronast, Istvan Barsony, Maria Adam, Cs. Dücsö | Porous silicon as multifunctional material in MEMS | Proceedings of the 2001 1st IEEE Conference on Nanotechnology : IEEE-NANO 2001 : October 28-30, 2001, Maui, Hawaii, pp. 483-488, 2001 | BibTeX | RIS | DOI |
| Andras Kovacs, Ulrich Mescheder | Surface Micromachining Process for C-Si as Active Material | Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany, pp. 620-623, 2001 | BibTeX | RIS |
2000 | |||
| Ulrich Mescheder, Andras Kovacs | Mikrotechnologie: Herstellung von porösem Silizium und seine Anwendungsmöglichkeit in der Sensortechnologie | 2000 | BibTeX | RIS |
1992 | |||
| Andras Kovacs, A. Stoffel | Optimierung der Technologie und Herstellung von freitragenden Polysilizium-Membranen | 1992 | BibTeX | RIS |