Zur Person
Stationen
- Seit 1991 Professor an der Hochschule Furtwangen,
Leiter des Technologielabors für Mikro- und Nanosysteme,
Prorektor für Forschung der HFU (bis 29.02.2024),
Stellvertretender Sprecher des kooperativen Promotionskollegs „Generierungsmechanismen für Mikrostrukturen“ (in Kooperation mit der Universität Freiburg/IMTEK) - 1985-1991 Philips Forschungslaboratorium Hamburg
- 1985 Dr. rer. nat an der Universität Marburg
- 1982 Dipl.-Phys., Festkörperphysik
Forschungsfelder und / oder Lehrgebiete
Forschungsgebiete
- Mikrosystemtechnik
- Mikrosensoren
- Mikroaktoren
- Mikrooptik
- Mikro- und Nanotechnologie
Autor und Mitautor von mehr als 150 Veröffentlichungen und sieben Patenten.
Autor des Lehrbuches Mikrosystemtechnik
Lehrgebiete
- Optoelektronik
- Werkstoffe der Elektrotechnik
- Mikrotechnologie und Mikrofertigung
- Photovoltaik
- Sensoren und Aktuatoren
Publikationen
Mescheder, Ulrich
2024 | |||
| Benjamin Sittkus, Julien Petit, Gerald Urban, Ulrich Mescheder | Crack preserving effect in ultrathin metal films on elastomer membranes induced by e-beam irradiation | FLEPS2024 : IEEE International Conference on Flexible and Printable Sensors and Systems, June 30 - July 3, 2024,Tampere, Finland ; Conference Proceedings, 2024 | BibTeX | RIS | DOI |
2023 | |||
| Sonja Müller, Ulrich Mescheder | Energy requirement and energy management for an active implant | MikroSystemTechnik Kongress 2023, 23. - 25. Oktober 2023, Dresden, Germany, 2023 | BibTeX | RIS |
| Alina Kohler, Felix Blendinger, Sonja Müller, Ulrich Mescheder, Volker Bucher | Feasibility of Parylene C for encapsulating piezoelectric actuators in active medical implants | Frontiers in Medical Technology, Vol.5.2023, 2023 | BibTeX | RIS | DOI | URN |
| Hakan Alaboz, Benjamin Sittkus, Divya D. Muley, Ulrich Mescheder | Finger position sensing on curved surfaces in braille displays | MikroSystemTechnik Kongress 2023, 23. - 25. Oktober 2023, Dresden, Germany, 2023 | BibTeX | RIS |
| Ashish Bhave, Benjamin Sittkus, Stefan J. Rupitsch, Ulrich Mescheder, Knut Möller | Finite Element Analysis of a High Compliant Balloon with Strain Sensing Segments for the Identification of Biomechanical Properties within Tubular Vessels | IFAC-PapersOnLine, 56.2023(2), pp. 8242-8247, 2023 | BibTeX | RIS | DOI | URN |
| Ashish Bhave, Benjamin Sittkus, Gerald Urban, Ulrich Mescheder, Knut Möller | Finite element analysis of the interaction between high-compliant balloon catheters and non-cylindrical vessel structures: towards tactile sensing balloon catheters | Biomechanics and Modeling in Mechanobiology, 22.2023(6), pp. 2033-2061, 2023 | BibTeX | RIS | DOI | URN |
| Isman M. Khazi, Jürgen Wilde, Gregor Neusser, Christine Kranz, Ulrich Mescheder | In situ analysis of electrochemical deposition kinetics for nanocrystalline nickel-cobalt alloys with varying bath hydrodynamics | Surface and Coatings Technology, 464.2023(July), 2023 | BibTeX | RIS | DOI |
| Benjamin Sittkus, Ulrich Mescheder | In-situ SEM analysis tool for stretchable metal-elastomer-laminate-membranes for flexible sensors | MikroSystemTechnik Kongress 2023, 23. - 25. Oktober 2023, Dresden, Germany, 2023 | BibTeX | RIS |
| Almothana Albukhari, Ulrich Mescheder | Inchworm Motors and Beyond: A Review on Cooperative Electrostatic Actuator Systems | Actuators, 12.2023(4), p. 38, 2023 | BibTeX | RIS | DOI | URN |
| Przemyslaw Lopato, Michal Herbko, Ulrich Mescheder, Andras Kovacs | Influence of a thin dielectric layer on resonance frequencies of square SRR metasurface operating in THz band | Open Engineering, 13.2023(1), 2023 | BibTeX | RIS | DOI | URN |
| Przemyslaw Lopato, Michal Herbko, Paulina Gora, Ulrich Mescheder, Andras Kovacs, Alexander Filbert | Numerical Analysis of the Influence of Fabrication Process Uncertainty on Terahertz Metasurface Quality | Electronics, 12.2023(10), 2023 | BibTeX | RIS | DOI | URN |
| Sonja Müller, Stefan J. Rupitsch, Ulrich Mescheder | Study on Sensitivity and Accuracy of Piezoelectric Stack Actuators for Charge Self-Sensing | SMSI 2023 : Sensor and Measurement Science International, 8-11 May 2023, Nürnberg, Germany : Proceedings, pp. 372-373, 2023 | BibTeX | RIS | DOI |
| Shervin Keshavarzi, Andras Kovacs, Ulrich Mescheder | Surface Passivated Porous Silicon-Based Antireflective Coating | MikroSystemTechnik Kongress 2023, 23. - 25. Oktober 2023, Dresden, Germany, 2023 | BibTeX | RIS |
2022 | |||
| Sonja Müller, Stefan J. Rupitsch, Ulrich Mescheder | Experimental characterisation of a piezoelectrically actuated force amplifier using optical and self-sensing methods | ACTUATOR 2022; International Conference and Exhibition on New Actuator Systems and Applications, June 29-30, 2022, Mannheim, Germany, pp. 274-277, 2022 | BibTeX | RIS |
| Andras Kovacs, Julien Petit, Alexander Filbert, Ulrich Mescheder | Mikro- und Nanotechnologien machen Optik smart | 2022 | BibTeX | RIS |
| Shervin Keshavarzi, Andras Kovacs, Ulrich Mescheder | Porous Silicon Based Ultra-Band infrared Antireflective and Light absorbing Coating | Porous Semiconductors - Science and Technology 2022, PSST2022, March 27th - April 1st, 2022, Lido di Camaire (Lucca), Italy, 2022 | BibTeX | RIS | DOI |
| The Upper-Rhine Artificial Intelligence Symposium UR-AI 2022 : AI Applications in Medicine and Manufacturing, 19 October 2022, Villingen-Schwenningen, Germany | Christoph Reich, Ulrich Mescheder (Eds.)2022 | BibTeX | RIS | URN | |
2021 | |||
| Ulrich Kallmann, Michael Lootze, Ulrich Mescheder | Charakterisierung und erste Anwendung eines MEMS-basierten adaptiven Zylinderspiegels | DGaO-Proceedings 2021 : 122. Jahrestagung der DGaO, 21. - 23. September 2021, Bremen, Germany, 2021 | BibTeX | RIS |
| Hakan Alaboz, Andras Kovacs, Yasser Safa, Ulrich Mescheder | Development of Cost-Effective Automated Test System for Determining Lifetime of Gold Contacts Under Mechanical Load | MikroSystemTechnik Kongress 2021, 08. - 10. November 2021, Stuttgart-Ludwigsburg, Germany, pp. 738-741, 2021 | BibTeX | RIS |
| Isman M. Khazi, Andras Kovacs, Ulrich Mescheder | Effect of Surface Roughness on the Adhesion of PECVD coated Silicon-Carbide Thin-films on (110) monocrystalline-Silicon wafer | MikroSystemTechnik Kongress 2021, 08. - 10. November 2021, Stuttgart-Ludwigsburg, Germany, pp. 415-418, 2021 | BibTeX | RIS |
| Ulrich Mescheder, Michael Lootze, Khaled Aljasem | Evaluation and Optimization of a MOEMS Active Focusing Device | Micromachines, 12.2021(2), 2021 | BibTeX | RIS | DOI |
| Isman M. Khazi, Andras Kovacs, Ulrich Mescheder, Ali Zahedi, Bahman Azarhoushang | Fusion of Optical and Microfabricated Eddy-Current Sensors for the Non-Destructive Detection of Grinding Burn | Advances in Science, Technology and Engineering Systems Journal, 6.2021(1), pp. 1414-1421, 2021 | BibTeX | RIS | DOI | URN |
| Isman M. Khazi, Ulrich Mescheder, Jürgen Wilde | In situ Electroanalytical Modelling of the Influence of Bath Hydrodynamics on Nucleation Kinetics for Electrodeposition of Nickel-Cobalt Alloy System | SICT 2021, 7 - 9 April, 2021, Paris, France, Virtual Joint Conference, 2021 | BibTeX | RIS | DOI |
| Isman M. Khazi, Andras Kovacs, Ulrich Mescheder | Inductive Transducers with 2D Microcoils in Reflection Differential Transmitter-Receiver Mode for the Micro Non-Destructive Testing of Grinding Burn | The 21st International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2021, 20 - 25 June 2021, online virtual conference, pp. 1202-1205, 2021 | BibTeX | RIS | DOI |
| Isman M. Khazi, Ulrich Mescheder, Jürgen Wilde | Influence of bath hydrodynamics on the micromechanical properties of electrodeposited nickel-cobalt alloys | Materials, 14.2021(14), 2021 | BibTeX | RIS | DOI |
| Rui Zhu, Ulrike Wallrabe, Peter Woias, Matthias C. Wapler, Ulrich Mescheder | Influence of electrode design on actuation characteristics of cooperative DEAP actuators | ACTUATOR 21 : International Conference and Exhibition on New Actuator Systems and Applications, 17-19 February 2021, Online Conference, Germany, pp. 357-360, 2021 | BibTeX | RIS |
| Almothana Albukhari, Ulrich Mescheder | Investigation of the Dynamics of a 2-DoF Actuation Unit Cell for a Cooperative Electrostatic Actuation System | Actuators, 10.2021(10), 2021 | BibTeX | RIS | DOI | URN |
| Benjamin Sittkus, Ulrich Mescheder, Gerald Urban | Processing method of thin metal-polymer laminate membranes and transfer to cylindrically shaped substrates for flexible sensors | MikroSystemTechnik Kongress 2021, 08. - 10. November 2021, Stuttgart-Ludwigsburg, Germany, pp. 430-433, 2021 | BibTeX | RIS |
| Ulrich Kallmann, Michael Lootze, Ulrich Mescheder | Simulative and Experimental Characterization of an Adaptive Astigmatic Membrane Mirror | Micromachines, 12.2021(2), 2021 | BibTeX | RIS | DOI | URN |
2020 | |||
| Andras Kovacs, Isman M. Khazi, Ali Zahedi, Ulrich Mescheder, Bahman Azarhoushang | Development of an Optical Sensor for the Non-Destructive Testing of Grinding Burn | IEEE Sensors 2020, October 25-28, 2020, Rotterdam, Netherlands, 2020 | BibTeX | RIS |
| Isman M. Khazi, Andras Kovacs, Ali Zahedi, Christian Reser, Ulrich Mescheder, Bahman Azarhoushang, Christoph Reich | In situ Qualitätsbeurteilung von Schleifprozessen mittels Mikrosystemtechnik basierter Sensorfusion | ZfP heute : Wissenschaftliche Beiträge zur zerstörungsfreien Prüfung heute; Sonderband 2020, pp. 99-101, 2020 | BibTeX | RIS |
| Isman M. Khazi, Andras Kovacs, Ulrich Mescheder, Benjamin Sittkus, Rui Zhu | Kleiner, flexibler, leistungsfähiger | 2020 | BibTeX | RIS |
| Isman M. Khazi, Andras Kovacs, Ali Zahedi, Ulrich Mescheder, Bahman Azarhoushang | Microfabricated Eddy-Current Sensors for Non-Destructive Testing of the Micro Grinding Burn | IEEE Sensors 2020, October 25-28, 2020, Rotterdam, Netherlands, 2020 | BibTeX | RIS |
| Isman M. Khazi, Andras Kovacs, Ulrich Mescheder | Microfabrication of 3D Free-Forms with Textured Surface Morphology in Monocrystalline Silicon using Grayscale Technology | Journal of Applied Material Science & Engineering Research, 4.2020(4), pp. 150-154, 2020 | BibTeX | RIS | DOI |
| Isman M. Khazi, Andras Kovacs, Rui Zhu, Ulrich Mescheder | Optimization of Microfabricated 2D Planar Spiral Microcoils for the Micro NDT of Grinding Burn | Comsol Conference 2020 Europe, October 14–15, 2020 | BibTeX | RIS |
| Isman M. Khazi, Andras Kovacs, Ali Zahedi, Christian Reser, Ulrich Mescheder, Bahman Azarhoushang, Christoph Reich | Real time In-Situ Quality Monitoring of Grinding Process using Microtechnology based Sensor Fusion | 2020 IEEE International Conference on Semiconductor Electronics (ICSE), Kuala Lumpur, Malaysia, 2020, pp. 180-184, 2020 | BibTeX | RIS | DOI |
| Andras Kovacs, Dagmar Martin, Alexander Filbert, Volker Bucher, Ulrich Mescheder | Single and Multilayer Atomic Layer Deposition on and into Mesoporous Silicon Layers | ECS Transactions, 98.2020(2), pp. 121-130, 2020 | BibTeX | RIS | DOI |
2019 | |||
| Almothana Albukhari, Frederico Lima, Ulrich Mescheder | Bed-Embedded Heart and Respiration Rates Detection by Longitudinal Ballistocardiography and Pattern Recognition | Sensors, 19.2019(6), 2019 | BibTeX | RIS | DOI | URN |
| Rui Zhu, Ulrich Mescheder | Deap Based Actuator for Tactile and Microfluidics Applications | 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 23-27 June 2019, Berlin, Germany, pp. 2432-2435, 2019 | BibTeX | RIS | DOI |
| Alexander Bejan, Frederico Lima, Ulrike Lindwedel, Almothana Albukhari, Rui Zhu, Maab Inayah, Christophe Kunze, Ulrich Mescheder | Design und Evaluation eines low-cost Ambient-Assisted-Living-Sensorsystems zur ballistokardiografischen Messung der Vitalfunktionen und Aktivitäten älterer Bewohner | 6. Ambient Medicine® Forum „Assistive Technik für selbstbestimmtes Wohnen", 19.-20. Februar 2019, pp. 15-22, 2019 | BibTeX | RIS |
| Rui Zhu, Lennart Rubbert, Pierre Renaud, Ulrich Mescheder | Determination of a tactile feedback strategy for use in robotized percutaneous procedures | 41st Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC), July 23 - 27, 2019, Berlin, Germany, pp. 5846-5850, 2019 | BibTeX | RIS | DOI |
| Frederico Lima, Isman M. Khazi, Ulrich Mescheder, Alok C. Tungal, Uma Muthiah | Fabrication of 3D microstructures using grayscale lithography | Advanced Optical Technologies, 8.2019(3-4), pp. 181-193, 2019 | BibTeX | RIS | DOI |
| Benjamin Sittkus, Andras Kovacs, Ulrich Mescheder | Fabrication of a microfluidic system with columnar structures using DRIE for blood brain barrier applications | MikroSystemTechnik Kongress 2019 : Mikroelektronik | MEMS-MOEMS | Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin, pp. 750-753, 2019 | BibTeX | RIS |
| Benjamin Sittkus, Rui Zhu, Ulrich Mescheder | Flexible piezoresistive PDMS metal-thin-film sensor-concept for stiffness evaluation of soft tissues | IEEE International Conference on Flexible and Printable Sensors and Systems : FLEPS 2019, July 7 - 10, 2019, Glasgow, United Kindom, 2019 | BibTeX | RIS | DOI |
| Frederico Lima, Ulrich Mescheder, Harald Leiste, Müller Claas | Influence of current density on the adhesion of seedless electrodeposited copper layers on silicon | Surface and Coatings Technology, 375.2019(October), pp. 554-564, 2019 | BibTeX | RIS | DOI |
| Isman M. Khazi, Ulrich Mescheder | Influence of electrochemical operating conditions on the microme-chanical properties of electrodeposited Nickel-Cobalt alloys for fabrication of microtools | MikroSystemTechnik Kongress 2019 : Mikroelektronik | MEMS-MOEMS | Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin, pp. 599-602, 2019 | BibTeX | RIS |
| Frederico Lima, Almothana Albukhari, Ulrich Mescheder | Machine Learning for Contactless Low-Cost Vital Signs Monitoring Systems | Artificial Intelligence: From Research to Application: The Upper-Rhine Artificial Intelligence Symposium UR-AI 2019, March 13th, 2019, Offenburg, Germany, pp. 95-99, 2019 | BibTeX | RIS |
| Isman M. Khazi, Andras Kovacs, Vaibhav Kumar, Pranav Dhumal, Ulrich Mescheder | Microfabricated 2D planar eddy-current microcoils for the non-destructive testing of grinding burn marks | Non-destructive Testing and Diagnostics, pp. 29-35, 2019 | BibTeX | RIS | DOI |
| Isman M. Khazi, Ulrich Mescheder | Micromechanical properties of anomalously electrodeposited nanocrystalline Nickel-Cobalt alloys: a review | Materials Research Express, 6.2019(8), pp. 1-25, 2019 | BibTeX | RIS | DOI |
| Shervin Keshavarzi, Andras Kovacs, Mohammad Abdo, Vlad Badilita, Jan G. Korvink, Ulrich Mescheder | Miniaturized porous silicon rugate filter wheel for multispectral imaging applications | MikroSystemTechnik Kongress 2019 : Mikroelektronik | MEMS-MOEMS | Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin, pp. 464-467, 2019 | BibTeX | RIS |
| Shervin Keshavarzi, Andras Kovacs, Mohammad Abdo, Vlad Badilita, Rui Zhu, Jan G. Korvink, Ulrich Mescheder | Porous Silicon Based Rugate Filter Wheel for Multispectral Imaging Applications | ECS Journal of Solid State Science and Technology, 8.2019(3), pp. Q43-Q49, 2019 | BibTeX | RIS | DOI | URN |
| Shervin Keshavarzi, Andras Kovacs, Ulrich Mescheder | Porous silicon based antireflection coating for the MWIR range | MikroSystemTechnik Kongress 2019 : Mikroelektronik | MEMS-MOEMS | Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin, pp. 487-490, 2019 | BibTeX | RIS |
| Rui Zhu, Ulrike Wallrabe, Peter Woias, Matthias C. Wapler, Ulrich Mescheder | Semi-rigid ring-shaped electrode dielectric electroactive polymer membrane as buckling actuator | Journal of Micromechanics and Microengineering, 29.2019(5 Aufsatz 055001), 2019 | BibTeX | RIS | DOI |
2018 | |||
| Isman M. Khazi, Ulrich Mescheder, Uma Muthiah | 3D free forms in c-Si via grayscale lithography and RIE | Microelectronic Engineering, 193.2018(June), pp. 34-40, 2018 | BibTeX | RIS | DOI |
| Frederico Lima, Almothana Albukhari, Rui Zhu, Ulrich Mescheder | Contactless Sleep Monitoring Measurement Setup | Eurosensors 2018: Graz, Austria, 9-12 September 2018, Proceedings, Volume 2, 2018 | BibTeX | RIS | DOI |
| Frederico Lima, Almothana Albukhari, Rui Zhu, Ulrich Mescheder | Contactless Sleep Monitoring Measurement Setup | XXXII Eurosensors 2018, September 9-12, 2018, Graz, Austria, 2018 | BibTeX | RIS |
| Frederico Lima, Ulrich Mescheder, C. Müller, Holger Reinecke | Copper electrodeposition on silicon electrodes | International Journal of Surface Science and Engineering, 12.2018(2), pp. 99-118, 2018 | BibTeX | RIS | DOI |
| Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke | Formation Mechanisms of Self-Organized Needles in Porous Silicon Based Needle-Like Surfaces | Journal of The Electrochemical Society, 165.2018(3), pp. E108-E114, 2018 | BibTeX | RIS | DOI | URN |
| Frederico Lima, Ulrich Mescheder, Gabor L. Katona, Harald Leiste, Emre Özel, Claas Müller, Holger Reinecke | Influence of silicon doping type on the adhesion of seedless electrodeposited copper layers | Surface and Coatings Technology, 349.2018(September), pp. 208-216, 2018 | BibTeX | RIS | DOI |
| Ulrich Mescheder, Shervin Keshavarzi, Surjitsinh Chauhan | New concepts for miniaturized MEMS based power systems | IEEE CANDO-EPE 2018 proceedings : IEEE International Conference and Workshop in Óbuda on Electrical and Power Engineering : November 20-21, 2018, Budapest, Hungary, pp. 000033-000038, 2018 | BibTeX | RIS | DOI |
| Shervin Keshavarzi, Frederico Lima, Wolfgang Kronast, Ulrich Mescheder | Sequential Nano-Explosion Using Patterned Porous Silicon | Journal of Microelectromechanical Systems, 27.2018(2), pp. 250-258, 2018 | BibTeX | RIS | DOI |
| Andras Kovacs, Ulrich Mescheder | Thin Photonic Crystals for Optical Characterization of Ultrathin Hafnium Dioxide in Mesoporous Layers | IEEE Sensors 2018, October 28 - 31, 2018, New Dehli, India, Conference Proceedings, 2018 | BibTeX | RIS | DOI |
| Andras Kovacs, Shervin Keshavarzi, A. O. Perez, Stefan Palzer, Ulrich Mescheder | Tunable Light Source for Photoacoustic Sensing Applications | IEEE Sensors 2018, October 28 - 31, 2018, New Dehli, India, Conference Proceedings, 2018 | BibTeX | RIS | DOI |
2017 | |||
| Uma Muthiah, Isman M. Khazi, Ulrich Mescheder | 3D Strukturierung von Silizium mittels Grauwert-Technologie | MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme, 23. – 25. Oktober 2017 in München, pp. 692-695, 2017 | BibTeX | RIS |
| Shervin Keshavarzi, Wolfgang Kronast, Frederico Lima, Ulrich Mescheder | Controlled energy release based on explosive porous silicon | MEMS 2017: The 30th IEEE International Conference on Micro Electro Mechanical Systems, January 22 - 26, 2017, Las Vegas, USA, pp. 712-715, 2017 | BibTeX | RIS | DOI |
| Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke | Effect of Capillary Forces in Room Temperature Si-Si Direct Bonding Technique Using Velcrolike Surfaces | Journal of Microelectromechanical Systems, 26.2017(2), pp. 385-395, 2017 | BibTeX | RIS | DOI |
| Shervin Keshavarzi, Frederico Lima, Wolfgang Kronast, Ulrich Mescheder | Energieversorgung für mobile miniaturisierte Systeme | 2017 | BibTeX | RIS |
| Frederico Lima, Alok Tungal, Isman M. Khazi, Ulrich Mescheder | Galvanisch aus 3D-Fotolack-Strukturen abgeformte metallische 3D-Freiformen | MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme, 23. – 25. Oktober 2017 in München, pp. 375-378, 2017 | BibTeX | RIS |
| Dirk Benyoucef, Vera Kallfaß, Andras Kovacs, Ulrich Mescheder, Stefan Palzer | Mikrosystemtechnische Geruchssensorik und ihre Anwendungen in AAL | Assistive Systeme und Technologien zur Förderung der Teilhabe für Menschen mit Hilfebedarf : Ergebnisse aus dem Projektverbund ZAFH-AAL, Pabst Science Publisher: Lengerich, pp. 51-66, 2017 | BibTeX | RIS |
| Andras Kovacs, Alexey Ivanov, Ulrich Mescheder | Schmalbandige photonische Kristalle für Multispektral-Analyse | MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme, 23. – 25. Oktober 2017 in München, pp. 836-839, 2017 | BibTeX | RIS |
2016 | |||
| Alexey Ivanov, Andras Kovacs, Ulrich Mescheder | Application of local backside contacts for structuring Of silicon with anodization: simulation and experiments | Procedia Engineering, Vol.168.2016, pp. 1180-1183, 2016 | BibTeX | RIS | DOI |
| Rui Zhu, Ulrike Wallrabe, Matthias C. Wapler, Peter Woias, Ulrich Mescheder | Dielectric electroactive polymer membrane actuator with ring-type electrode as driving component of a tactile actuator | Procedia Engineering, pp. 1537-1540, 2016 | BibTeX | RIS | DOI |
| Ulrich Mescheder, Alok Tungal, Frederico Lima | Electroplated 3D metal free forms casted from 3D photoresist molds | 42nd International Conference on Micro and Nano Engineering, September 19-23, 2016, Vienna, Austria, 2016 | BibTeX | RIS | DOI |
| Isman M. Khazi, Ulrich Mescheder | Influence of Anode to Cathode Distance on the Alloy Composition in Anomalously Electrodeposited Nickel-Cobalt Alloys | Electrochemistry from sense to sustainability: the 67th Annual Meeting of the International Society of Electrochemistry, 21-26 August, 2016, The Hague, The Netherlands, 2016 | BibTeX | RIS |
| Victor V. Lyubimov, Vladimir M. Volgin, Ulrich Mescheder, Inna V. Gnidina, Alexey Ivanov | Investigation of plastic electrode tools for electrochemical machining of silicon | Precision Engineering, Vol.47.2016, pp. 546-556, 2016 | BibTeX | RIS | DOI |
| Alvaro O. Pérez, Vera Kallfaß-de Frenes, Alexander Filbert, Janosch Kneer, Benedikt Bierer, Pirmin Held, Philipp Klein, Jürgen Wöllenstein, Dirk Benyoucef, Sigrid Kallfaß, Ulrich Mescheder, Stefan Palzer | Odor-Sensing System to Support Social Participation of People Suffering from Incontinence | Sensors, 17.2017(1), 2016 | BibTeX | RIS | DOI | URN |
| Andras Kovacs, Ulrich Mescheder | PSi-based Diffusion Membranes | Porous Silicon: Biomedical and Sensor Applications, Volume Two, Ghenadii Korotcenkov (Ed.)CRC Press: Boca Raton, pp. 279-298, 2016 | BibTeX | RIS |
| Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke | Room Temperature Si–Si Direct Bonding Technique Using Velcro-Like Surfaces | Journal of Microelectromechanical Systems, 25.2016(2), pp. 371-379, 2016 | BibTeX | RIS | DOI |
| Alexey Ivanov, Ulrich Mescheder | Surface Micromachining (Sacrificial Layer) and Its Applications in Electronic Devices | Porous Silicon: Optoelectronics, Microelectronics, and Energy Technology Applications, Volume Three, Ghenadii Korotcenkov (Ed.)CRC Press: Boca Raton, pp. 129-141, 2016 | BibTeX | RIS |
2015 | |||
| Ulrich Mescheder, Andras Kovacs, Wolfgang Kronast, Bernhard Müller, Alexey Ivanov | Adaptiver optischer Filter bzw. spektral einstellbare Lichtquelle | 2015 | BibTeX | RIS |
| Frederico Lima, Holger Reinecke, Ulrich Mescheder | Adhesion of Continuous and Homogeneous Electrodeposited Copper Layers on Silicon | MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe, pp. 409-412, 2015 | BibTeX | RIS |
| Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke | Bonding Mechanism in the Velcro Concept Si-Si Low Temperature Direct Bonding Technique | 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, 2015, pp. 413-416, 2015 | BibTeX | RIS | DOI |
| Isman M. Khazi, Ulrich Mescheder, Zohaib Siddiqui | Characterization of the influence of Sodium-Lauryl-Sulfate on the surface quality of electrodeposited Nickel-Cobalt alloys | MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe, pp. 436-439, 2015 | BibTeX | RIS |
| Ulrich Mescheder, Isman M. Khazi | Corner rounding of sharp silicon punching tool edges by local oxidation of silicon | Microelectronic Engineering, 141.2015(2), pp. 178-183, 2015 | BibTeX | RIS | DOI |
| Thomas Bier, Dirk Benyoucef, Wolfgang Kronast, Ulrich Mescheder | MEMS-Geruchssensorik zur Unterstützung von Pflege und diskretem Leben | 2015 | BibTeX | RIS |
| Paul Walden, Janosch Kneer, Stefan Knobelspies, Wolfgang Kronast, Ulrich Mescheder, Stefan Palzer | Micromachined Hotplate Platform for the Investigation of Ink-Jet Printed, Functionalized Metal Oxide Nanoparticles | Journal of Microelectromechanical Systems, 24.2015(5), pp. 1384-1390, 2015 | BibTeX | RIS | DOI |
| Alexey Ivanov, Isman M. Khazi, Andras Kovacs, Ulrich Mescheder | Miniaturisiertes Spektrometer für neue Ansätze in der Analytik | 2015 | BibTeX | RIS |
| Ulrich Mescheder, Rui Zhu | Miniaturisiertes taktiles Mensch-Maschine-Interface | 2015 | BibTeX | RIS |
| Wolfgang Kronast, Volker Lange, Rolf Huster, Ulrich Mescheder | Optische Charakterisierung von Stress-relaxierten aktiven MOEMS-Membranspiegeln mit großer Apertur | MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe, pp. 523-526, 2015 | BibTeX | RIS |
| Alexey Ivanov, Ulrich Mescheder | Primary Current Distribution Model for Electrochemical Etching of Silicon Through a Circular Opening | Proceedings of the 2015 COMSOL Conference, Grenoble, 2015 | BibTeX | RIS |
| Andras Kovacs, Alexey Ivanov, Ulrich Mescheder | Refractometer Using Photonic Crystals for Fermentation Process Characterization | IEEE SENSORS, Busan, 2015, pp. 1363-1366, 2015 | BibTeX | RIS | DOI |
| Isman M. Khazi, Ulrich Mescheder | Self-aligning micro punch-die tool-system for high precision blanking of thin metal foils | MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe, pp. 429-432, 2015 | BibTeX | RIS |
| Surjitsinh Chauhan, Bernhard Müller, Ulrich Mescheder | Simulation, Fabrication and Characterization of Robust Vibrational Energy Harvester | Procedia Engineering, pp. 349-354, 2015 | BibTeX | RIS | DOI |
| Isman M. Khazi, Ulrich Mescheder | Surface polishing of rough (110) silicon plane by HNA etching resulting from wet anisotropic KOH etching | MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe, pp. 417-420, 2015 | BibTeX | RIS |
| Andras Kovacs, Philipp Maurer, Ulrich Mescheder | Temperatureinfluss auf die Peakposition bei verschiedenen Umgebungsmedien in Porösen Silizium Multilayerschichten | MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe, pp. 547-550, 2015 | BibTeX | RIS |
| Andras Kovacs, Alexey Ivanov, Ulrich Mescheder | Tunable Narrow Band Porous Photonic Crystals for MOEMS Based Scanning Systems | Procedia Engineering, pp. 811-815, 2015 | BibTeX | RIS | DOI |
| Ulrich Mescheder | Zentrum für Angewandte Forschung: Assistive Systeme und Technologien zur Sicherung sozialer Beziehungen und Teilhabe für Menschen mit Hilfebedarf: Teilprojekt 2: µ - AAL - Entwicklung eines miniaturisierten Körpergeruchssensors | 2015 | BibTeX | RIS |
2014 | |||
| Rui Zhu, Ulrich Mescheder, Frederico Lima | Actuation concept for miniaturized tactile systems | 1. Baden-Württemberg Center of Applied Research Symposium on Information and Communication Systems: SInCom 2014; 12. December 2014 in Furtwangen, pp. 44-49, 2014 | BibTeX | RIS |
| Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke | Characterisation and simulation of low temperature Si-Si direct bonding through velcro-like surfaces based on porous silicon | MEMS 2014: The 27th IEEE International Conference on Micro Electro Mechanical Systems, January 26-30, 2014, San Francisco, pp. 1119-1122, 2014 | BibTeX | RIS | DOI |
| Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Rolf Huster | Development of a focusing micromirror device with an in-plane stress relief structure in silicon-on-insulator technology | Journal of Micro/Nanolithography, MEMS, and MOEMS, 13.2014(1), 2014 | BibTeX | RIS | DOI |
| Frederico Lima, Ulrich Mescheder, Holger Reinecke | Electrochemical Impedance Spectroscopy of n-Si(100) Pre-etched by KOH or BHF | 10th International Symposium on Electrochemical Impedance Analysis, June 1-5, 2014, Borovets, Bulgaria, 2014 | BibTeX | RIS |
| Alexey Ivanov, Ulrich Mescheder, Peter Woias | Finite-Elements Simulation of Etch Front Propagation in Silicon Electropolishing Process | ECS Transactions, 58.2014(46), pp. 15-24, 2014 | BibTeX | RIS |
| Ulrich Mescheder | Forschungsgebiet Mikrosystemtechnik im Forschungsschwerpunkt Smart Systems | Forschungsreport ... für die Elektrotechnik in Baden-Württemberg, pp. 48-51, 2014 | BibTeX | RIS |
| Ulrich Mescheder, Isman M. Khazi, Andras Kovacs, Alexey Ivanov | MOEMS based concept for miniaturized monochromators, spectrometers and tunable light sources | 1. Baden-Württemberg Center of Applied Research Symposium on Information and Communication Systems: SInCom 2014; 12. December 2014 in Furtwangen, pp. 38-43, 2014 | BibTeX | RIS |
| Frederico Lima, Ulrich Mescheder, Holger Reinecke | Maskless Selective Electrodeposition on Silicon | The 65th Annual Meeting of the International Society of Electrochemistry: Ubiquitous Electrochemistry; 31 August-5 September 2014, Lausanne, Switzerland, 2014 | BibTeX | RIS |
| Laszlo Becsi, Thomas Bier, Wolfgang Kronast, Ulrich Mescheder, Dirk Benyoucef | Miniaturisiertes Impulslärm-Dosimeter zur Untersuchung und Vermeidung von Gehörschädigungen bei Menschen | SENSOREN UND MESSSYSTEME: 17. ITG/GMA-Fachtagung, 3.-4. Juni 2014, Nürnberg, Convention Center, 2014 | BibTeX | RIS |
| Nigol Kaste, Alexander Filbert, Ulrich Mescheder, Toomas Rang, Galina Rang | Process Development For 3D Laser Lithography | WIT Transactions on The Built Environment, Vol.137.2014, pp. 139-150, 2014 | BibTeX | RIS | DOI | URN |
| Ulrich Mescheder, Isman M. Khazi, Andras Kovacs, Alexey Ivanov | Tunable optical filters with wide wavelength range based on porous multilayers | Nanoscale Research Letters, p. 427, 2014 | BibTeX | RIS | DOI | URN |
2013 | |||
| Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller | Developement of stress relief suspensions for micro-machined silicon membranes | COMSOL Conference 2013, 23–25 October 2013, Rotterdam, Netherlands, 2013 | BibTeX | RIS |
| Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Rolf Huster | Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology | Proceedings of SPIE: Volume 8616; MOEMS and Miniaturized Systems XII, 2-6 Februar 2013, San Francisco, California, United States, 2013 | BibTeX | RIS | DOI |
| Andras Kovacs, Aina Malisauskaite, Ulrich Mescheder | Einfluss der Morphologie auf die Sensitivität eines photonischen Biosensors | Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen, pp. 818-821, 2013 | BibTeX | RIS |
| Ulrich Mescheder, Bernhard Müller, Antwi Nimo, Awad S. Abou Elkeir | Energy Harvesting: Silizium-Chip zum Ernten von Energie aus Vibration | 2013 | BibTeX | RIS |
| Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Rolf Huster | Entwicklung einer Stressausgleichsstruktur für spannungsarme aktive Membranspiegel in SOI Technologie | Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen, pp. 432-435, 2013 | BibTeX | RIS |
| Laszlo Becsi, Dirk Benyoucef, Thomas Bier, Wolfgang Kronast, Ulrich Mescheder | Entwicklung eines Impulslärm-Dosimeters zur Untersuchung von Gehörschädigungen bei Menschen | Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen, pp. 578-581, 2013 | BibTeX | RIS |
| Laszlo Becsi, Wolfgang Kronast, Ulrich Mescheder, Thomas Bier, Dirk Benyoucef | Miniaturisiertes Impulslärm-Dosimeter zur Untersuchung und Vermeidung von Gehörschädigungen | 2013 | BibTeX | RIS |
| Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke | Modeling the adhesion between nanoneedle surfaces bonded based on Velcro or Gecko principle | Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen, pp. 864-867, 2013 | BibTeX | RIS |
| Andras Kovacs, Aina Malisauskaite, Alexey Ivanov, Ulrich Mescheder, Rainer Wittig | Optical sensing and analysis system based on porous layers | 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS), 27-31 October 2013, Freiburg, Germany, pp. 275-277, 2013 | BibTeX | RIS |
| Andras Kovacs, Aina Malisauskaite, Alexey Ivanov, Ulrich Mescheder | Portable Optical Sensor Using Tunable Optical Multilayers | Sensors 2013, November 4-6, 2013, Baltimore, Maryland, USA: IEEE; Proceedings, pp. 1691-1694, 2013 | BibTeX | RIS | DOI |
| Ulrich Mescheder, Qingyun Gu, Bernhard Müller | Preiswerter und robuster Harvester für Vibrationsenergie | Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen, pp. 107-110, 2013 | BibTeX | RIS |
| Rui Zhu, Aina Malisauskaite, Ulrich Mescheder, Ulrike Wallrabe | Proof of Concept and Properties of Micro Hydraulic Displacement Amplifier | COMSOL Conference 2013, 23–25 October 2013, Rotterdam, Netherlands, 2013 | BibTeX | RIS |
| Andras Kovacs, Aina Malisauskaite, Alexey Ivanov, Ulrich Mescheder | Steuerung der Peaklage und der Sensitivität von siliziumbasierten porösen optischen Multischichten | Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen, pp. 185-188, 2013 | BibTeX | RIS |
| Ulrich Mescheder, Rolf Huster, Rui Zhu | Technische Unterstützung für Blinde zur sicheren Bewegung in unbekanntem Umfeld 2. Mikrosystemtechnischer taktiler Informationsgeber für ein Blindennavigationssystem | 2013 | BibTeX | RIS |
| Andras Kovacs, Wolfgang Kronast, Alexander Filbert, Ulrich Mescheder | Transport in Surface Passivated Porous Silicon Membranes | ECS Transactions, 50.2013(37), pp. 207-216, 2013 | BibTeX | RIS |
2012 | |||
| Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke, Andras Kovacs | Contact Mechanics and Needle Like Surfaces for Micro-Nano Integration | 23rd Micromechanics and Microsystems Europe Workshop: MME 2012, September 9 - 12, Ilmenau, Germany, 2012 | BibTeX | RIS |
| Alexey Ivanov, Ulrich Mescheder | Dynamic Simulation of Electrochemical Etching of Silicon with COMSOL | Proceedings COMSOL Conference, Milan, Italy, 10.-12.10.2012, 2012 | BibTeX | RIS |
| S. Hildering, Laszlo Becsi, U. Engel, M. Merklein, Ulrich Mescheder | Experimental investigations on high-precision microcutting of copper foils with microfabricated silicon punches | Proceedings of the 12th international conference of the european society for precision engineering and nanotechnology, June 4th - 7th 2012, Stockholm, Sweden, Volume II, pp. 177-180, 2012 | BibTeX | RIS |
| Ulrich Mescheder, Antwi Nimo, Bernhard Müller, Awad S. Abou Elkeir | Micro harvester using isotropic charging of electrets deposited on vertical sidewalls for conversion of 3D vibrational energy | Microsystem Technologies, 18.2012(7-8), pp. 931-943, 2012 | BibTeX | RIS | DOI |
| Thomas Bruns, Laszlo Becsi, Ulrich Mescheder, Herbert Schneckenburger | Microfluidic system for single cell sorting based on deflection by optical tweezers | Focus on Microscopy 2012, Singapore, April 1 - April 4, 2012, 2012 | BibTeX | RIS |
| Andras Kovacs, Alexey Ivanov, Aina Malisauskaite, Ulrich Mescheder | Oberflächenstabilisierung nanostrukturierter poröser Siliziumschichten für sensorische Anwendungen | 74. Mikro-Nano-Integration : Beiträge des 4. GMM-Workshops, 12. - 13. November 2012 in Berlin, 2012 | BibTeX | RIS |
| Frederico Lima, Ulrich Mescheder, Holger Reinecke | Simulation of Current Density for Electroplating on Silicon Using a Hull Cell | Proceedings COMSOL Conference, Milan, Italy, 10.-12.10.2012, 2012 | BibTeX | RIS |
| S. Hildering, Laszlo Becsi, M. Merklein, Ulrich Mescheder | Tranciatura ad alta precisione con punzoni in silicio | Lamiera, pp. 44-48, 2012 | BibTeX | RIS |
| Andras Kovacs, Ulrich Mescheder | Transport mechanisms in nanostructured porous silicon layers for sensor and filter applications | Sensors and Actuators B: Chemical, 175.2012(December), pp. 179-185, 2012 | BibTeX | RIS | DOI |
2011 | |||
| Antwi Nimo, Ulrich Mescheder, Bernhard Müller, Awad S. Abou Elkeir | 3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls | Proceedings of SPIE: Volume 8066; Smart Sensors, Actuators, and MEMS V, 18-20 April 2011, Prague, Czech Republic, 2011 | BibTeX | RIS | DOI |
| Antwi Nimo, Ulrich Mescheder, Bernhard Müller, Awad S. Abou Elkeir | A device for 3D energy harvesting | SPIE Newsroom, 2011 | BibTeX | RIS | DOI |
| Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Antwi Nimo, Claus Braxmaier | Entwicklung eines quasistatischen Mikrodrehspiegels für Laserinterferometrie | 2011 | BibTeX | RIS |
| Andras Kovacs, Ulrich Mescheder | Herstellung und Charakterisierung perforierter und poröser Membranmodulen für Mikro- und Nanofiltration | MikroSystemTechnik - Kongress 2011: 10. - 12. Oktober 2011, Darmstadt, 2011 | BibTeX | RIS |
| Alexey Ivanov, Andras Kovacs, Ulrich Mescheder | High quality 3D shapes by silicon anodization | physica status solidi (a), 208.2011(6), pp. 1383-1388, 2011 | BibTeX | RIS | DOI |
| Prasad Jonnalagadda, Ulrich Mescheder, Andras Kovacs, Antwi Nimo | Nanoneedles based on porous silicon for chip bonding with self assembly capability | physica status solidi (c), 8.2011(6: Special Issue: 7th International Conference on Porous Semiconductors – Science and Technology (PSST 2010) • EnFI 2010 Conference – Engineering of Functional Interfaces), pp. 1841-1846, 2011 | BibTeX | RIS | DOI |
| Ting Yuan, Ulrich Mescheder, Wolfgang Kronast, Changlong Wang | Optimization of Deformation Shape of an Active Electro-Optical Focusing Device | Advanced Materials Research, pp. 3116-3120, 2011 | BibTeX | RIS | DOI |
| Ulrich Mescheder, Prasad Jonnalagadda, Andras Kovacs, X. Meng | Optischer Biosensor mittels selbstorganisierter nanostrukturierte Multilayerschichten | 2011 | BibTeX | RIS |
| Andras Kovacs, Prasad Jonnalagadda, Ulrich Mescheder | Optoelectrical detection system using porous silicon-based optical multilayers | IEEE Sensors Journal, 11.2011(10), pp. 2413-2420, 2011 | BibTeX | RIS | DOI |
| Alexey Ivanov, Ulrich Mescheder | Silicon Electrochemical Etching for 3D Microforms with High Quality Surfaces | Advanced Materials Research, Vol.325.2011, pp. 666-671, 2011 | BibTeX | RIS | DOI |
2010 | |||
| Antwi Nimo, Ulrich Mescheder | 3-D capacitive vibrational harvester for autonomous low power sensors | Proceedings of PowerMEMS 2010, Nov 30-Dec 3, Leuven, Belgium, pp. 49-52, 2010 | BibTeX | RIS |
| Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Antwi Nimo, Claus Braxmaier, Thilo Schuldt | Development of a tilt actuated micromirror for applications in laser interferometry | Proceedings of SPIE: Volume 7594; SPIE MOEMS-MEMS, 2010, San Francisco, California, United States, 2010 | BibTeX | RIS | DOI |
| Awad Saad, Ulrich Mescheder, Bernhard Müller, Antwi Nimo | High eficient, low cost electret charging set-up for mems based energy harvesting systems | Proceedings of PowerMEMS 2010, Nov 30-Dec 3, Leuven, Belgium, pp. 61-64, 2010 | BibTeX | RIS |
| Thomas Bruns, Laszlo Becsi, Marc Talkenberg, Michael Wagner, Petra Weber, Ulrich Mescheder, Herbert Schneckenburger | Microfluidic system for single cell sorting with optical tweezers | Proceedings of SPIE: Volume 7376; Laser Applications in Life Sciences 2010, Oulu, Finland, 2010 | BibTeX | RIS | DOI |
| Alexey Ivanov, Andras Kovacs, Ulrich Mescheder | Nasschemisches Ätzen von nahezu beliebigen 3D-Strukturen in Silizium | 63. Mikro-Nano-Integration - 2. GMM-Workshops 03.03.2010 - 04.03.2010 in Erfurt, Germany, 2010 | BibTeX | RIS |
| Ulrich Mescheder, Prasad Jonnalagadda, Andras Kovacs, X. Meng | Optischer Biosensor mittels selbstorganisierter nanostrukturierte Multilayerschichten | 63. Mikro-Nano-Integration - 2. GMM-Workshops 03.03.2010 - 04.03.2010 in Erfurt, Germany, pp. 105-110, 2010 | BibTeX | RIS |
| Andras Kovacs, Ulrich Mescheder, Prasad Jonnalagadda, X. Meng | Optisches Messsystem für biosensorische Anwendungen | Sensoren und Messsysteme 2010 : Vorträge der 15. ITG-GMA-Fachtagung vom 18. bis 19. Mai 2010 in Nürnberg, 2010 | BibTeX | RIS |
| Simon Ressel, Martin Gohlke, Dominik Rauen, Thilo Schuldt, Wolfgang Kronast, Ulrich Mescheder, Ulrich Johann, Dennis Weise, Claus Braxmaier | Ultrastable assembly and integration technology for ground- and space-based optical systems | Applied Optics, 49.2010(22), pp. 4296-4303, 2010 | BibTeX | RIS |
2009 | |||
| Andras Kovacs, Prasad Jonnalagadda, X. Meng, Ulrich Mescheder | Characterization of porous silicon based optical sensor system for biosensor applications | IEEE Sensors 2009 Conference, New Zealand, 25-28 October, 2009, Christchurch, New Zealand, pp. 21-26, 2009 | BibTeX | RIS | DOI |
| Herbert Schneckenburger, Rainer Börret, Claus Braxmaier, Rudolf Kessler, Petra Kioschis, Dietrich Kühlke, Ulrich Mescheder, Werner Schröder, Christoph Nachtigall | Dem Energiestoffwechsel von Tumorzellen und Bioreagenzien auf der Spur | BioPhotonik, pp. 26-28, 2009 | BibTeX | RIS |
| Andras Kovacs, Prasad Jonnalagadda, X. Meng, Ulrich Mescheder | Entwicklung und Charakterisierung von photonischen Multischichten aus porösem Silizium für biosensorische Anwendungen | MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany, 2009 | BibTeX | RIS |
| Alexey Ivanov, Ulrich Mescheder, Peter Woias, Michael Kröner | Formation of arbitrarily shaped 3D-forms in silicon by electrochemical wet-etching | 2009 | BibTeX | RIS |
| Andras Kovacs, Dirk Meister, Ulrich Mescheder | Investigation of humidity adsorption in porous silicon layers | physica status solidi (a), 206.2009(6), pp. 1343-1347, 2009 | BibTeX | RIS | DOI |
| Ulrich Mescheder, Andras Kovacs, Jutaphorn Kritwattanakhorn, Bernhard Müller, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein, Christoph Ament, Andreas Peter | Mikrostrukturierter Sensorarray zur Luftqualitätsmessung (MOSEL) | Dokumentation zum Forschungstag 2009 "Hochtechnologieforschung": 7. Juli 2009, Kultur- und Kongresszentrum, Liederhalle Stuttgart, p. 169, 2009 | BibTeX | RIS |
| Thomas Link, Ulrich Mescheder | Mikrotechniken für den wirtschaftlichen Erfolg | 2009 | BibTeX | RIS |
| Ulrich Mescheder, Andras Kovacs, Prasad Jonnalagadda, Antwi Nimo | Nanostrukturierte Siliziumoberflächen für Mikro-Nano-Integration | MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany, 2009 | BibTeX | RIS |
| Alexey Ivanov, Andras Kovacs, Ulrich Mescheder, S. Kuhn, M. Kübler, A. Burr | Optimisation of Surface Quality of 3D Silicon Master Forms for Injection Molding of Optical Micro Elements | MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany, 2009 | BibTeX | RIS |
| Ulrich Mescheder, Bernhard Müller, Safi Baborie, P. Urbanovic | Properties of SiO2 electret films charged by ion implantation for MEMS-based energy harvesting systems | Journal of Micromechanics and Microengineering, 19.2009(9), 2009 | BibTeX | RIS | DOI |
| Ulrich Mescheder, Andras Kovacs, Prasad Jonnalagadda, Antwi Nimo | Selbstjustierendes Bondverfahren unter Verwendung nanostrukturierter Oberflächen | 2009 | BibTeX | RIS |
| Ulrich Mescheder, Andras Kovacs, Prasad Jonnalagadda, Antwi Nimo, David Kauzlaric, Jan Lienemann, Andreas Greiner, Jan Korvink, Markus Freudenreich | Skalierbare Verbindungstechnik mittels anpassbarer nanoskaliger Verbindungsstrukturen (NanoBond) | 2009 | BibTeX | RIS |
| Ulrich Mescheder, Safi Barborie, Bernhard Müller | Smart Energy: Miniaturisierte Energieversorung für autarke mikroelektronische und Mikro-Systeme | 2009 | BibTeX | RIS |
| Wolfgang Kronast, Ulrich Mescheder, Rolf Huster | Stressuntersuchung und Optimierung von SOI basierten Membranen | MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany, 2009 | BibTeX | RIS |
| Ulrich Mescheder, Dietrich Kühlke | Zentrum für Angewandte Forschung Photon hoch n: Photonische Verfahren in neuen Dimensionen | 2009 | BibTeX | RIS |
2008 | |||
| Ulrich Mescheder, P. Urbanovic, Bernhard Müller, Safi Baborie | Charging of SiO2 Electret Film by Ion Implantation for MEMS Based Energy Harvesting Systems | Proceedings of PowerMEMS 2008 + microEMS2008, Sendai, Japan, November 9-12, (2008), pp. 501-504, 2008 | BibTeX | RIS |
| Adam Kovacs, Andras Kovacs, Ulrich Mescheder | Estimation of elasticity modulus and fracture strength of thin perforated SiN membranes with finite element simulations | Computational Materials Science, 43.2008(1), pp. 59-64, 2008 | BibTeX | RIS | DOI |
| Alexey Ivanov, Ulrich Mescheder, M. Kröner, Peter Woias | Formation of Arbitrarily Shaped 3D-Forms in Silicon by 315 Electrochemical Wet-Etching | Technical digest / MME 2008, 19th MicroMechanics Europe Workshop, September 28 - 30, 2008, Aachen, Germany, pp. 315-318, 2008 | BibTeX | RIS |
| HFU Forscher top | VS Campus: Magazin der Hochschule Furtwangen für Villingen-Schwenningen und Furtwangen, pp. 7-18, 2008 | BibTeX | RIS | |
| T. Hellmuth, Konstantin Khrennikov, Wolfgang Kronast, Rolf Huster, Ulrich Mescheder | Optimisation and characterisation of parabolic membrane mirrors | Proceeedings of SPIE: Volume 6993; MEMS, MOEMS, and Micromachining III, 9–10 April 2008, Strasbourg, France, 2008 | BibTeX | RIS | DOI |
2007 | |||
| Daniela Kögler, Rolf Huster, Wolfgang Kronast, Ulrich Mescheder | Aufbau- und Verbindungstechnik für ein mikrooptisches System | Mikrosystemtechnik-Kongress 2007 : 15. - 17. Oktober 2007, Dresden, 2007 | BibTeX | RIS |
| Alexey Ivanov, Ulrich Mescheder, Andras Kovacs, Rolf Huster | Einfluss unterschiedlicher Passivierungsschichten auf die Bildungsrate von porösem Silizium an Strukturkanten bei der 3DFormherstellung | Mikrosystemtechnik-Kongress 2007 : 15. - 17. Oktober 2007, Dresden, 2007 | BibTeX | RIS |
| Ulrich Mescheder, Marie-Luise Bauersfeld, Andras Kovacs, Jutaphorn Kritwattanakhorn, Bernhard Müller, Andreas Peter, Christoph Ament, Sven Rademacher, Jürgen Wöllenstein | MEMS-Based Air Quality Sensor | Transducers '07 Eurosensors XXI : digest of technical papers ; the 14th International Conference on Solid-State Sensors, Actuators and Microsystems, June 10-14, 2007, Lyon, France, pp. 1417-1420, 2007 | BibTeX | RIS | DOI |
| Andras Kovacs, Adam Kovacs, M. Pogany, Ulrich Mescheder | Mechanical investigation of perforated and porous membranes for micro- and nanofilter applications | Sensors and Actuators B: Chemical, 127.2007(1), pp. 120-125, 2007 | BibTeX | RIS | DOI |
| Ulrich Mescheder | Mikrosystemtechnik: Ergebnisse aus dem Forschungsnetzwerk ZeMiS (Zentrum für Mikrotechnik und Systemintegration) | 2007 | BibTeX | RIS |
| Andras Kovacs, Adam Kovacs, Marton Pogany, Ulrich Mescheder | Mikrosystemtechnik: Herstellung perforierter und poröser Membranmodule für die Mikro- und Nanofiltration | 2007 | BibTeX | RIS |
| Jutaphorn Kritwattanakhorn, Andras Kovacs, Ulrich Mescheder, Bernd Müller, Christoph Ament, Andreas Peter, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein | Mikrosystemtechnik: Sensorarray zur Lufqualitätsmessung | 2007 | BibTeX | RIS |
| Andreas Peter, Christoph Ament, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein, Jutaphorn Kritwattanakhorn, Andras Kovacs, Bernhard Müller, Ulrich Mescheder | Modellbasierte Verfahren zur Bestimmung der Luftgüte | Mikrosystemtechnik-Kongress 2007 : 15. - 17. Oktober 2007, Dresden, 2007 | BibTeX | RIS |
| Ulrich Mescheder, Rolf Huster, Wolfgang Kronast, Thomas Hellmuth, Konstantin Khrennikov | Optimierung und Charakterisierung eines Membranspiegels zur dynamischen Fokussierung | Mikrosystemtechnik-Kongress 2007 : 15. - 17. Oktober 2007, Dresden, 2007 | BibTeX | RIS |
| Jutaphorn Kritwattanakhorn, Marie-Luise Bauersfeld, Andras Kovacs, Bernhard Müller, Ulrich Mescheder, Sven Rademacher, Jürgen Wöllenstein | Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems | Sensors and Actuators B: Chemical, 127.2007(1), pp. 126-131, 2007 | BibTeX | RIS | DOI |
| Andras Kovacs, Bernhard Müller, Jutaphorn Kritwattanakhorn, Ulrich Mescheder, Andreas Peter, Christoph Ament, Jürgen Wöllenstein, Marie-Luise Bauersfeld, Sven Rademacher | Sensor system for air quality measurement | Smart system integration 2007 : Paris, France 27. - 28.03.2007, pp. 519-522, 2007 | BibTeX | RIS |
2006 | |||
| Rolf Huster, Andras Kovacs, Ulrich Mescheder | 3-D Micro Free-Form Manufacturing in Silicon: Micro Free- Form Production for Plastics Moulding Technology | Galvanotechnik, 97.2006(2), pp. 442-447, 2006 | BibTeX | RIS |
| Ulrich Mescheder, Zoltan Torok, Wolfgang Kronast | Active focusing device based on MOEMS technology | Proceedings of SPIE: Volume 8168; MEMS, MOEMS, and Micromachining II, 2006, Strasbourg, France, 2006 | BibTeX | RIS |
| Ulrich Mescheder, Carlos Estan, Gergoe Somogyi, Markus Freudenreich | Distortion optimized focusing mirror device with large aperture | Sensors and Actuators A: Physical, 130-131/2006(August), pp. 20-27, 2006 | BibTeX | RIS | DOI |
| Adam Kovacs, Zsolt Vizvary, Andras Kovacs, Ulrich Mescheder | Large Defection Analysis of Perforated Silicon Nitride Membranes | 6th European Solid Mechanics Conference: ESMC 2006; 28 August – 1 September, 2006 Budapest, Hungary, 2006 | BibTeX | RIS |
| Jutaphorn Kritwattanakhorn, Andras Kovacs, Ulrich Mescheder, Bernhard Müller, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein | Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems | XX Eurosensors: 20th Anniversary; Göteborg, Sweden, 17-20 September 2006, pp. 376-377, 2006 | BibTeX | RIS |
| Andras Kovacs, M. Pogany, Ulrich Mescheder, Adam Kovacs | Realization and mechanical investigation of perforated and porous membranes for filter applications | XX Eurosensors: 20th Anniversary; Göteborg, Sweden, 17-20 September 2006, pp. 392-393, 2006 | BibTeX | RIS |
| Ulrich Mescheder, Andras Kovacs | Verfahren zur Bildung einer Ausnehmung in der Oberfläche eines Werkstücks, insbesondere zur Herstellung von Mikroformen | 2006 | BibTeX | RIS |
2005 | |||
| Christoph Ament, Marie-Luise Bauersfeld, Andras Kovacs, Jutaphorn Kritwattanakhorn, Ulrich Mescheder, Bernhard Müller | "Single chip"-Sensorarray zu Luftqualitätsmessung | Mikrosystemtechnik-Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg, 2005 | BibTeX | RIS |
| Rolf Huster, Andras Kovacs, Ulrich Mescheder | 3-D Micro Free-Form Manufacturing in Silicon Micro-Free- Form Production for Plastics Moulding Technology | Micro system technologies 2005 : International Conference & Exhibition on Micro-, Electro-Mechanical, Opto & Nano Systems, München, October 5 - 6, 2005, 2005 | BibTeX | RIS |
| Ulrich Mescheder, Andras Kovacs | 3D-Mikrostrukturierungsverfahren: von kristallinem Silizium mit lokal einstellbarem Anisotropiefaktor | MikroSystemTechnik, pp. 7-9, 2005 | BibTeX | RIS |
| Ulrich Mescheder, Markus Freudenreich | Charakterisierung eines bi-stabilen Schalters mit großem Schaltweg und einstellbaren Haltekräften | Mikrosystemtechnik-Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg, 2005 | BibTeX | RIS |
| Ulrich Mescheder, Carlos Estan, Gergoe Somogyi, Markus Freudenreich | MOEMS focusing device with ideal parabolic deflection shape | Transducers '05 : Seoul, Korea, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems; Digest of Technical Papers, pp. 1000-1005, 2005 | BibTeX | RIS | DOI |
| Ulrich Mescheder, Gergoe Somogyi, Markus Freudenreich, Carlos Estan, Zoltan Török | Mikrosystemtechnik: Mikrotechnische hergestelltes aktiv-optisches System für Fokussieraufgaben | 2005 | BibTeX | RIS |
| Ulrich Mescheder, Andras Kovacs, Roland Schneider | Mikrosystemtechnik: Optische Penmaus mit Bluetooth | 2005 | BibTeX | RIS |
| Ulrich Mescheder, Gergoe Somogyi, Markus Freudenreich, Carlos Estan | Mikrotechnisch hergestellter Membranspiegel für aktive Fokussierung | Horizonte, pp. 16-20, 2005 | BibTeX | RIS |
| Rolf Huster, Ulrich Mescheder, R. Valero | Mikrotechnologie: Mikrofreiformerzeugung in Silizium | 2005 | BibTeX | RIS |
| Wolfgang Kronast, Ulrich Mescheder | Nanotechnologie: Das Rasterkraftmikroskop (AFM) - Strukturierung und Charakterisierung im Nanometerbereich | 2005 | BibTeX | RIS |
| Andreas Peter, Christoph Ament, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein, Andras Kovacs, Jutaphorn Kritwattanakhorn, Bernhard Müller, Ulrich Mescheder | Neuartiger Mikrosensor zur Luftgütemessung mit kombiniertem Feuchte- und Gassensor | 50. Internationales Wissenschaftliches Kolloquium, Technische Universität Ilmenau, 19.-23. September 2005, pp. 273-274, 2005 | BibTeX | RIS |
| Ulrich Mescheder, Andras Kovacs, Roland Schneider | Optische Penmaus mit Bluetooth | Horizonte, pp. 8-11, 2005 | BibTeX | RIS |
2004 | |||
| Mark Herding, Gergoe Somogyi, Ulrich Mescheder, Peter Woias | A new micromachined optical fiber switch for instrumentation purposes | Proceedings of SPIE: Volume 5455; MEMS, MOEMS, and Micromachining, Photonics Europe, 26-30 April 2004, Strasbourg, France, 2004 | BibTeX | RIS |
| Wolfgang Kronast, Aritz J. Laskurain, Ulrich Mescheder | Das Rasterkraftmikroskop (AFM) zur Charakterisierung und Strukturierung im Nanometerbereich | Horizonte, pp. 3-8, 2004 | BibTeX | RIS |
| Ulrich Mescheder | Mikrosystemtechnik : Konzepte und Anwendungen | Vieweg + Teubner: Stuttgart, 978-3-519-16256-8, 2004 | BibTeX | RIS |
| Christoph Nachtigall, Ulrich Mescheder | Movement giver having body with after-glowing surface | 2004 | BibTeX | RIS |
| Ulrich Mescheder | Nanoporous Silicon: Multifunctional Material for Microsystems | Novel vehicle concepts and emerging vehicle technologies : papers presented at the RTO Applied Vehicle Technology Panel (AVT) symposium held in Brussels, Belgium, 7 - 10 April 2003, 2004 | BibTeX | RIS |
| Ulrich Mescheder, Wolfgang Kronast, N. Naychuk | Reliability investigations in micromechanical devices | Sensors and Actuators A: Physical, 110.2004(1-3), pp. 150-156, 2004 | BibTeX | RIS | DOI |
| Markus Freudenreich, Ulrich Mescheder, Gergoe Somogyi | Simulation and realization of a novel micromechanical bi-stable switch | Sensors and Actuators A: Physical, 114.2004(2-3), pp. 451-459, 2004 | BibTeX | RIS | DOI |
2003 | |||
| Markus Freudenreich, Ulrich Mescheder, Gergoe Somogyi | Design Consideration and Realization of a Novel Micromechanical Bi-Stable Switch | Transducers '03: The 12th International Conference on Solid-State Sensors, Actuators and Microsystems; Digest of Technical Papers, Volume 2, pp. 1096-1099, 2003 | BibTeX | RIS |
| Ulrich Mescheder | Modern Silicon-based MEMS Technology | Smart Sensors and MEMS, Kluwer Academic Publishers: Dordrecht, pp. 255-272, 2003 | BibTeX | RIS |
| Ulrich Mescheder | Porous Silicon: Technology and Applications for Micromachining and MEMS | Smart Sensors and MEMS, Kluwer Academic Publishers: Dordrecht, pp. 273-288, 2003 | BibTeX | RIS |
| P. Fürjes, Andras Kovacs, Cs. Dücsö, Maria Adam, Bernhard Müller, Ulrich Mescheder | Porous silicon-based humidity sensor with interdigital electrodes and internal heaters | Sensors and Actuators B: Chemical, 95.2003(1-3), pp. 140-144, 2003 | BibTeX | RIS | DOI |
2002 | |||
| Ulrich Mescheder, Andras Kovacs, A. Fahad, Rolf Huster | 3D structuring of c-Si using porous silicon as sacrificial material | Proceedings of the 2002 2nd IEEE Conference on Nanotechnology: IEEE-NAN0 2002; August 26-28, Washington D.C., pp. 33-36, 2002 | BibTeX | RIS | DOI |
| Ulrich Mescheder, M. Alavi, K. Hiltmann, Ch. Lietzau, Christoph Nachtigall, H. Sandmaier | Local laser bonding for low temperature budget | Sensors and Actuators A: Physical, 97-98.2002(April), pp. 422-427, 2002 | BibTeX | RIS | DOI |
| Ulrich Mescheder, Wolfgang Kronast | Mikrotechnologie: Lebensdaueruntersuchungen an mikromechanischen Bauelementen | 2002 | BibTeX | RIS |
| Ulrich Mescheder | Mikrotechnologie: Zentrum für Mikrotechnik und Systemintegration (ZeMiS) | 2002 | BibTeX | RIS |
| Ulrich Mescheder, Wolfgang Kronast, N. Naychuk | Reliability Investigations in Micromechanical Devices | Eurosensors XVI, The 16th European Conference on Solid-State Transducers, September 15-18, 2002 Prague, Czech Republic, pp. 145-146, 2002 | BibTeX | RIS |
| Ulrich Mescheder | Sensorik: Optische Bewegungserkennung | 2002 | BibTeX | RIS |
| Ulrich Mescheder, Andras Kovacs, Bernhard Müller | Sensorik: Porous Silicon Based Humidity Sensor with Interdigital Electrodes and Internal Heaters | 2002 | BibTeX | RIS |
| Ulrich Mescheder, Andras Kovacs, Bernhard Müller, Maria Adam, Istvan Barsony, Csaba Dücsö, Peter Fürjes | Verfahren zur Herstellung von Feuchtesensoren | 2002 | BibTeX | RIS |
2001 | |||
| Christoph Nachtigall, Ulrich Mescheder | Bewegungsgeber | 2001 | BibTeX | RIS |
| Ulrich Mescheder, M. Alavi, K. Hiltmann, Ch. Lizeau, Christoph Nachtigall, H. Sandmaier | Local Laser Bonding for Low Temperature Budget | Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany, pp. 218-221, 2001 | BibTeX | RIS |
| Christoph Nachtigall, Ulrich Mescheder | Movement giver | 2001 | BibTeX | RIS |
| Ulrich Mescheder, Andras Kovacs, Wolfgang Kronast, Istvan Barsony, Maria Adam, Cs. Dücsö | Porous silicon as multifunctional material in MEMS | Proceedings of the 2001 1st IEEE Conference on Nanotechnology : IEEE-NANO 2001 : October 28-30, 2001, Maui, Hawaii, pp. 483-488, 2001 | BibTeX | RIS | DOI |
| Andras Kovacs, Ulrich Mescheder | Surface Micromachining Process for C-Si as Active Material | Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany, pp. 620-623, 2001 | BibTeX | RIS |
2000 | |||
| Ulrich Mescheder | Aktorik: Nanomotor | 2000 | BibTeX | RIS |
| Christoph Nachtigall, Ulrich Mescheder | Bewegungsgeber | 2000 | BibTeX | RIS |
| Ulrich Mescheder | Mikrosystemtechnik : Konzepte und Anwendungen | Teubner: Stuttgart, 3-519-06256-9, 2000 | BibTeX | RIS |
| Ulrich Mescheder, Andras Kovacs | Mikrotechnologie: Herstellung von porösem Silizium und seine Anwendungsmöglichkeit in der Sensortechnologie | 2000 | BibTeX | RIS |
| Ulrich Mescheder | Mikrotechnologie: Laserbearbeitung in der Mikrotechnik | 2000 | BibTeX | RIS |
| Ulrich Mescheder | Sensorik: Chip im Reifen - Oberflächenmikromechanik | 2000 | BibTeX | RIS |
| Ulrich Mescheder | Sensorik: Mikromechanischer Neigungssensor | 2000 | BibTeX | RIS |
| M. Reichardt, Ulrich Mescheder, Nagy Nosseir | Simulation of a Micro-Fabricated Inclinometer | Proceedings of the International Conference on Mathematics and Engineering Techniques in Medicine and Biological Sciences, METMBS '00; Las Vegas, Nevada, June 26 - 29, 2000, pp. 309-314, 2000 | BibTeX | RIS |
1999 | |||
| Ulrich Mescheder, Christiane Kötter | Optical monitoring and control of Si wet etching | Sensors and Actuators A: Physical, 76.1999(1-3), pp. 425-430, 1999 | BibTeX | RIS | DOI |
1998 | |||
| Ulrich Mescheder, Christiane Kötter | Optical monitoring and control of Si wet etching | Eurosensors XII : proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications, Southampton, UK, 13 - 16 September 1998, pp. 51-54, 1998 | BibTeX | RIS |
| Ulrich Mescheder, C. Kötter, E. Kolguin, A. Oukhov | Optische Insitu-Prozesskontrolle beim anisotropen Ätzen von Si-Membranen | Sensoren und Meßtechnik: Vorträge der ITG-Fachtagung vom 9. bis 11. März 1998 in Bad Nauheim, pp. 365-372, 1998 | BibTeX | RIS |
| Ulrich Mescheder, Christiane Kötter, B. Katzenstein | Piezoelectric Inch Worm Motor with Monolithically Integrated Driving Block | Actuator 98, 6th International Conference on New Actuators with accompanying exhibition : 17 - 19 June, 1998, Bremen, Germany, pp. 327-331, 1998 | BibTeX | RIS |
| Ulrich Mescheder, Christiane Kötter, B. Katzenstein, T. Lang | Piezoelectric inch worm motor with monolithically integrated driving block | 1998 | BibTeX | RIS |
| Ulrich Mescheder, Christiane Kötter | Verfahren und Vorrichtung zur photoinduzierten Kontrolle des anisotropen Ätzens von kristallinem Silizium | 1998 | BibTeX | RIS |
1997 | |||
| Ulrich Mescheder, S. Majer | Micromechanical inclinometer | Sensors and Actuators A: Physical, 60.1997(1-3), pp. 134-138, 1997 | BibTeX | RIS | DOI |
1996 | |||
| Ulrich Mescheder, S. Majer, R. Keller | 2-Achsen Si-Neigungssensor: Simulation und Realisierung | Sensoren und Messysteme : Tagung Bad Nauheim, 11. bis 13. März 1996 / VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik, pp. 83-93, 1996 | BibTeX | RIS |
| Ulrich Mescheder, S. Majer | Mikromechanischer Neigungssensor für industrielle Anwendungen | 41. Internationales Wissenschaftliches Kolloquium 23. - 26.09.1996, Technische Universität Ilmenau, Thüringen, Band 1 Vortragsreihen, pp. 507-514, 1996 | BibTeX | RIS |
| E. A. Kolgin, I. A. Tumanov, A. A. Ukhov, Ulrich Mescheder | Photometric device for control of micromechanical elements manufacturing | Proceedings of third international scientific technical Conference of Actual Problems of electronic instrument engineering, APEIE-96, Vol. 2, pp. 75-76, 1996 | BibTeX | RIS |
1995 | |||
| S. Majer, Ulrich Mescheder | Konzept eines planaren 2-Achsen Silizium Neigungssensors | Mikro-System-Technik : Mikromechanik & Mikroelektronik ; Chemnitz '95 ; 16. - 17. Oktober 1995, Chemnitz, pp. 112-120, 1995 | BibTeX | RIS |
| S. Majer, Ulrich Mescheder | Simulation supported design of micromechanical sensors | Transactions on the Built Environment, Vol.12.1995, 1995 | BibTeX | RIS |
| S. Majer, Ulrich Mescheder | Simulation supported design of micromechanical sensors | Simulation and design of microsystems and microstructures : [papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, which was held in Southampton, UK, in September 1995, pp. 329-337, 1995 | BibTeX | RIS |
1991 | |||
| L.-M. Buchmann, Ulrich Mescheder, M. Torkler | Characterization of silicon open stencil masks in an ion projection lithography machine | Microelectronic Engineering, 13.1991(1-4), pp. 353-356, 1991 | BibTeX | RIS | DOI |
| M. Zander, Ulrich Mescheder | Maskenmetrologie: Anforderungen und Trends | Maskentechnik für Mikroelektronik-Bausteine : Tagungsbericht ; Tagung München, 14. November 1991, pp. 7-40, 1991 | BibTeX | RIS |
1990 | |||
| Ulrich Mescheder, U. Mackens, H. Lifka, R. Dammel, G. Pawloski, J. Theis | Application of positive and negative tone x-ray resist for 0.5μm CMOS device fabrication | Microelectronic Engineering, 11.1990(1-4), pp. 481-485, 1990 | BibTeX | RIS | DOI |
| H. Schaffer, Ulrich Mescheder, U. Weigmann, H.-C. Petzold | Influence of X-ray mask repair on pattern placement accuracy | Microelectronic Engineering, 11.1990(1-4), pp. 251-254, 1990 | BibTeX | RIS | DOI |
| H. Lüthje, A. Bruns, H. Harms, I. Köhler, Ulrich Mescheder, U. Mackens, T. Stuck | X-ray mask technology: Precise etching of sub-half-micron tungsten absorber features | Microelectronic Engineering, 11.1990(1-4), pp. 255-258, 1990 | BibTeX | RIS | DOI |
1989 | |||
| U. Mackens, Ulrich Mescheder, F. Mund, H. Lüthje, H. Lifka, C.A.H. Juffermans, P.H. Woerlee, A.J. Walker | Fabrication of 0.5 μm NMOS-devices by all level X-ray lithography | Microelectronic Engineering, 09.1989(1-4), pp. 89-92, 1989 | BibTeX | RIS | DOI |
| Ulrich Mescheder, U. Mackens, F. Mund | Investigation Of Linewidth Uniformity In X-Ray Lithography | Proceedings of SPIE: Volume 1087; Integrated Circuit Metrology, Inspection, and Process Control III, Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States, pp. 396-406, 1989 | BibTeX | RIS |
| U. Mackens, Ulrich Mescheder, H. Lüthje | Röntgenstrahllithographie: Herstellung einer 0.5 μm Schaltung und Overlayuntersuchungen | Mikroelektronik: Vorträge der GME-Fachtagung vom 13. bis 15. März 1989 in Baden-Baden, pp. 115-126, 1989 | BibTeX | RIS |
| S. Pongratz, Ulrich Mescheder, Ch. Ehrlich, H.-L. Huber, K. Kohlmann, W. Windbracke | State of the art of pattern placement accuracy of silicon X-ray master masks | Microelectronic Engineering, 09.1989(1-4), pp. 117-120, 1989 | BibTeX | RIS | DOI |
| Ulrich Mescheder, K. Werner | Submikrometer Linienbreitenmetrologie hoher Genauigkeit | Maskentechnik für Mikroelektronik-Bausteine: Tagungsbericht, München, 09. November 1989; VDI-Berichte, 795, pp. 155-190, 1989 | BibTeX | RIS |
1988 | |||
| U. Mackens, H. Lüthje, Ulrich Mescheder, F. Mund, S. Pongratz | Application Of Sic-X-Ray Masks For Fabricating Sub-Micron Devices | Proceedings of SPIE: Volume 0923; Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII, 1988 | BibTeX | RIS |
| H.-L. Huber, S. Pongratz, J. Trube, W. Windbracke, Ulrich Mescheder, F. Mund | Sub‐half‐micron critical dimension control in x‐ray lithography mask technology | Journal of Vacuum Science & Technology B: Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 06.1988(6), pp. 2184-2189, 1988 | BibTeX | RIS |
1987 | |||
| Ulrich Mescheder, F. Mund, H.-L. Huber | Linewidth metrology for x-ray masks with subhalfmicron feature size | Microelectronic Engineering, 06.1987(1-4), pp. 653-659, 1987 | BibTeX | RIS | DOI |
1986 | |||
| H. Betz, H.-L. Huber, S. Pongratz, W. Rohrmoser, W. Windbracke, Ulrich Mescheder | Silicon X-ray masks: Pattern placement and overlay accuracy | Microelectronic Engineering, 05.1986(1-4), pp. 41-49, 1986 | BibTeX | RIS | DOI |
| H. Lüthje, U. Mackens, Ulrich Mescheder, B. Matthießen | Stability of SiC-masks for high resolution synchrotron X-ray lithography | Microelectronic Engineering, 05.1986(1-4), p. 39, 1986 | BibTeX | RIS | DOI |
1985 | |||
| Ulrich Mescheder, G. Weiser | Optical study of space charge injection in plasma deposited a-Si:H | Journal of Non-Crystalline Solids, Vol.77-78.1985 Part 1, pp. 571-574, 1985 | BibTeX | RIS | DOI |
1984 | |||
| Ulrich Mescheder, G. Weiser | Electro‐optical effects on the absorption edge of a‐Si:H | AIP Conference Proceedings, pp. 356-363, 1984 | BibTeX | RIS |